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Glow Discharge Processes: Sputtering and Plasma Etching
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Glow Discharge Processes: Sputtering and Plasma Etching in Franklin, TN
Current price: $284.95
Barnes and Noble
Glow Discharge Processes: Sputtering and Plasma Etching in Franklin, TN
Current price: $284.95
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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applicationspractical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applicationspractical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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1800 Galleria Blvd #1310, Franklin, TN 37067, United States
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