Lithography refers to a planographic technique of printing that was formerly based on the immiscibility of water and oil. The printing is done on a smooth-surfaced stone or metal plate. Due to the requirement of high functional miniaturized systems in diverse fields, techniques of lithography have been developed and implemented for their intended goals in numerous fields. These include biomedical researches, semiconductor development, and chemical and biological analysis. Lithography plays an important role in nanofabrication and microfabrication techniques. Microfabrication is the technique of fabricating microscopic structures on the micrometer and smaller scales. Nanofabrication refers to a technique utilized for creating one, two or three-dimensional nanostructures in the size range of 1-100 nanometers. Microfabrication and nanofabrication are critical to the growth of miniaturized systems. This book elucidates the concepts and innovative models around prospective developments with respect to lithography and its application in microfabrication and nanofabrication. It will help the readers in keeping pace with the rapid changes in this field of study.